CLOSE-SPACED VAPOR TRANSPORT COMBINED WITH FREE EVAPORATION FOR DOPING OF SEMICONDUCTOR THIN-FILMS

被引：20
|
作者：
CASTRORODRIGUEZ, R
PENA, JL
机构：
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1993年 / 11卷 / 03期
关键词：
D O I：
10.1116/1.578801
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
引用
收藏
页码：730 / 731
页数：2
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