INVESTIGATIONS OF FABRICATION OF THIN SILICON FILMS FOR MICROWAVE SEMICONDUCTOR TRANSIT-TIME DEVICES

被引：10
|
作者：
FREYER, J [1 ]
机构：
[1] TECH UNIV MUNICH,INST ALLGEMEINE ELEKTR,8 MUNICH,FED REP GER
来源：
JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1975年 / 122卷 / 09期
关键词：
D O I：
10.1149/1.2134433
中图分类号：
O646 [电化学、电解、磁化学];
学科分类号：
081704 ;
摘要：
引用
收藏
页码：1238 / 1240
页数：3
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