INVESTIGATIONS OF FABRICATION OF THIN SILICON FILMS FOR MICROWAVE SEMICONDUCTOR TRANSIT-TIME DEVICES

被引：10

作者：

FREYER, J ^{[1
]}

机构：

[1] TECH UNIV MUNICH,INST ALLGEMEINE ELEKTR,8 MUNICH,FED REP GER

来源：

JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1975年 / 122卷 / 09期

关键词：

D O I：

10.1149/1.2134433

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

引用

页码：1238 / 1240

页数：3

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