INTEGRATED-CIRCUIT INSPECTION VIA ACOUSTIC MICROSCOPY

被引：11
|
作者：
WEGLEIN, RD
机构：
来源：
IEEE TRANSACTIONS ON SONICS AND ULTRASONICS | 1983年 / 30卷 / 01期
关键词：
D O I：
10.1109/T-SU.1983.31381
中图分类号：
O42 [声学];
学科分类号：
070206 ; 082403 ;
摘要：
引用
收藏
页码：40 / 42
页数：3
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