MOLECULAR-DYNAMICS MODELING OF VAPOR-PHASE AND VERY-LOW-ENERGY ION-BEAM CRYSTAL-GROWTH PROCESSES

被引:37
|
作者
DODSON, BW
机构
[1] Semiconductor Physics Division, Sandia National Laboratories, Albuquerque, New Mexico
关键词
D O I
10.1080/10408439008243747
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
[No abstract available]
引用
收藏
页码:115 / 130
页数:16
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