FORMATION AND PROPERTY OF POLYSILICON OXIDE-FILMS

被引:0
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作者
KIYOSUMI, F [1 ]
INO, M [1 ]
MIZOKAMI, Y [1 ]
机构
[1] OKI ELECT IND CO LTD,DIV ELECTR DEVICE,HACHIOJI,TOKYO 193,JAPAN
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D O I
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中图分类号
O646 [电化学、电解、磁化学];
学科分类号
081704 ;
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页码:C103 / C103
页数:1
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