AN INVESTIGATION OF ION-BOMBARDED SILICON BY ELLIPSOMETRY AND CHANNELING EFFECT

被引：12
|
作者：
LOHNER, T
MEZEY, G
KOTAI, E
MANUABA, A
PASZTI, F
DEVENYI, A
GYULAI, J
机构：
来源：
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH | 1982年 / 199卷 / 1-2期
关键词：
D O I：
10.1016/0167-5087(82)90244-7
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
引用
收藏
页码：405 / 408
页数：4
相关论文
共 50 条
  • [21] ABSENCE OF DONOR PROPERTIES OF PHOSPHORUS DIFFUSING IN ION-BOMBARDED SILICON.
    Karmanov, V.T.
    pavlov, P.V.
    Zorin, E.I.
    Tetel'baum, D.I.
    Khokhlov, A.F.
    Soviet Physics, Semiconductors (English translation of Fizika i Tekhnika Poluprovodnikov), 1975, 9 (09): : 1171 - 1172
  • [22] CHARACTERIZATION OF ION-IMPLANTED SILICON BY ELLIPSOMETRY AND CHANNELING
    LOHNER, T
    MEZEY, G
    KOTAI, E
    PASZTI, F
    MANUABA, A
    GYULAI, J
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH, 1983, 209 (MAY): : 615 - 620
  • [23] A SIMS STUDY OF THE ADSORPTION OF OXYGEN ON ION-BOMBARDED SILICON(111) SURFACES
    MARTON, D
    APPLIED SURFACE SCIENCE, 1980, 5 (01) : 65 - 72
  • [24] DEUTERIUM TRAPPING IN ION-BOMBARDED BERYLLIUM
    LIU, MB
    SHEFT, I
    GRUEN, DM
    JOURNAL OF NUCLEAR MATERIALS, 1979, 79 (01) : 267 - 269
  • [25] SOLUTE REDISTRIBUTION IN ION-BOMBARDED VANADIUM
    SANTHANAM, AT
    OKAMOTO, PR
    TAYLOR, A
    TRANSACTIONS OF THE AMERICAN NUCLEAR SOCIETY, 1973, 17 (NOV): : 214 - 215
  • [26] VOID SWELLING IN ION-BOMBARDED MOLYBDENUM
    BRIMHALL, JL
    SIMONEN, EP
    JOURNAL OF NUCLEAR MATERIALS, 1974, 52 (02) : 323 - 325
  • [27] COLLISIONAL DEEXCITATION AT ION-BOMBARDED SURFACES
    FINE, J
    SZYMONSKI, M
    KOLODZIEJ, J
    YOSHITAKE, M
    FRANZREB, K
    PHYSICAL REVIEW LETTERS, 1993, 71 (21) : 3585 - 3588
  • [28] SPECTRAL REFLECTIVITY OF ION-BOMBARDED SURFACES
    PRIMAK, W
    JOURNAL OF APPLIED PHYSICS, 1977, 48 (04) : 1556 - 1562
  • [29] EFFECT OF MAGNETIC-ORDERING ON THE CONDUCTIVITY OF ION-BOMBARDED POLYIMIDE
    ALESHIN, AN
    SUVOROV, AV
    SHLIMAK, IS
    DOBRODUMOV, AV
    SOLID STATE COMMUNICATIONS, 1989, 71 (02) : 85 - 87
  • [30] Analysis of Incorporation of Ion-Bombarded Nickel Ions with Silicon Nanocrystals for Microphotonic Devices
    Natrayan, L.
    Kumar, P. V. Arul
    Kaliappan, S.
    Sekar, S.
    Patil, Pravin P.
    Jayashri, R.
    Raj, E. S. Esakki
    JOURNAL OF NANOMATERIALS, 2022, 2022
12345