APPLICATIONS OF THE CONCENTRATION DEPTH PROFILING WITH PIXE

被引：2
|
作者：
JAKSIC, M
VAJIC, M
VALKOVIC, V
机构：
来源：
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1990年 / 49卷 / 1-4期
关键词：
D O I：
10.1016/0168-583X(90)90226-K
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
The applicability of PIXE concentration depth profiling was investigated by the variation of beam energy. The profile evaluation procedure was demonstrated by the measurements carried out on different multielement samples with known and unknown trace elements depth distribution. Application possibilities as well as the advantages and disadvantages of the technique are discussed. © 1990.
引用
收藏
页码：111 / 114
页数：4
相关论文
共 50 条
  • [31] Depth locating of elements by the PIXE technique
    Inst de Physique Nucleaire, Orsay, France
    Nucl Instrum Methods Phys Res Sect B, 3 (521-527):
  • [32] Depth locating of elements by the PIXE technique
    Lagarde, G
    Midy, P
    Brissaud, I
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1997, 132 (03): : 521 - 527
  • [33] BIOMEDICAL APPLICATIONS OF PIXE
    LINDH, U
    ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY, 1989, 197 : 35 - NUCL
  • [34] APPLICATIONS OF PIXE IN DENDROCHRONOLOGY
    REVESZ, P
    MAYER, JW
    VIZKELETHY, G
    KUNIHOLM, PI
    GRIGGS, CB
    KUNIHOLM, HE
    NEWTON, MW
    TARTER, SL
    ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY, 1991, 202 : 81 - NUCL
  • [35] Combining plasma profiling TOFMS with TOF-SIMS depth profiling for microelectronic applications
    Tempez, Agnes
    Legendre, Sebastien
    Barnes, Jean-Paul
    Nolot, Emmanuel
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2016, 34 (03):
  • [36] CONCENTRATION DEPTH PROFILING AND WEAR-RESISTANCE OF NITROGEN IMPLANTED STEELS
    POLLOCK, JTA
    SCOTT, MD
    KENNY, MJ
    PATERSON, PJK
    VEITCH, CJ
    APPLICATIONS OF SURFACE SCIENCE, 1985, 22-3 (MAY): : 128 - 135
  • [37] CONCENTRATION/DEPTH PROFILING AND WEAR RESISTANCE OF NITROGEN IMPLANTED STEELS.
    Pollock, J.T.A.
    Scott, M.D.
    Kenny, M.J.
    Paterson, P.J.K.
    Veitch, C.J.
    Applications of surface science, 1984, 22-23 : 128 - 135
  • [38] Neutron depth profiling applications at The University of Texas research reactor
    Unlu, K
    Wehring, BW
    JOURNAL OF RADIOANALYTICAL AND NUCLEAR CHEMISTRY, 1997, 217 (02) : 273 - 278
  • [39] Neutron depth profiling applications at The University of Texas research reactor
    K. Ünlü
    B. W. Wehring
    Journal of Radioanalytical and Nuclear Chemistry, 1997, 217 : 273 - 278
  • [40] Fast low energy SIMS depth profiling for ULSI applications
    Patel, SB
    Maul, JL
    CHARACTERIZATION AND METROLOGY FOR ULSI TECHNOLOGY, 1998, 449 : 782 - 785
12345