共 50 条
- [31] Silicides for polysilicon TFT-LCD applications [J]. ACTIVE MATRIX LIQUID CRYSTAL DISPLAYS TECHNOLOGY AND APPLICATIONS, 1997, 3014 : 141 - 146
- [32] Low power polysilicon sources for IR applications [J]. 1998 5TH INTERNATIONAL CONFERENCE ON SOLID-STATE AND INTEGRATED CIRCUIT TECHNOLOGY PROCEEDINGS, 1998, : 884 - 886
- [33] Property analysis of polysilane precursors and applications for polysilicon [J]. ANALYTICAL SCIENCE AND TECHNOLOGY, 2012, 25 (06): : 345 - 349
- [34] Identification and management of diffusion pathways in polysilicon encapsulation for MEMS devices [J]. MEMS 2008: 21ST IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST, 2008, : 104 - +
- [35] FABRICATION OF MICROMECHANICAL DEVICES FROM POLYSILICON FILMS WITH SMOOTH SURFACES [J]. SENSORS AND ACTUATORS, 1989, 20 (1-2): : 117 - 122
- [40] Deflection analysis of epitaxially deposited polysilicon encapsulation for MEMS devices [J]. 2004 IEEE International Conference on Semiconductor Electronics, Proceedings, 2004, : 611 - 614