共 50 条
- [33] DIAGNOSTICS OF FILM GROWTH IN PLASMA CHEMICAL VAPOR-DEPOSITION JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1988, 6 (03): : 2060 - 2060
- [36] FORMATION OF TANTALUM OXIDE BY CHEMICAL VAPOR-DEPOSITION JOURNAL OF THE LESS-COMMON METALS, 1974, 38 (2-3): : 211 - 219
- [38] Effect of the gas-phase reaction in metallorganic chemical vapor deposition of TiN from tetrakis(dimethylamido)titanium J Electrochem Soc, 7 (2453-2456):