REACTIVE ION-PLASMA BEAM ETCHING OF SILICON-CARBIDE

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作者：
POPOV, IV
SYRKIN, AL
CHELNOKOV, VE
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PISMA V ZHURNAL TEKHNICHESKOI FIZIKI | 1986年 / 12卷 / 04期
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O59 [应用物理学];
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页码：240 / 243
页数：4
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