PLASMA DEPOSITION OF GAAS EPITAXIAL-FILMS FROM METAL-ORGANIC SOURCES

被引：0
|
作者：
HUELSMAN, AD
REIF, R
机构：
[1] MIT,DEPT MAT SCI & ENGN,CAMBRIDGE,MA 02139
[2] MIT,DEPT ELECT ENGN & COMP SCI,CAMBRIDGE,MA 02139
来源：
JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1987年 / 134卷 / 8B期
关键词：
D O I：
暂无
中图分类号：
O646 [电化学、电解、磁化学];
学科分类号：
081704 ;
摘要：
引用
收藏
页码：C485 / C485
页数：1
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