THE FORMATION OF TITANIUM SILICIDES BY RAPID THERMAL-PROCESSING - AN XRD AND AES STUDY

被引:4
|
作者
BENSCH, W
PAMLER, W
机构
来源
REACTIVITY OF SOLIDS | 1989年 / 7卷 / 03期
关键词
D O I
10.1016/0168-7336(89)80041-5
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
引用
收藏
页码:249 / 262
页数:14
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