共 50 条
- [1] KINETICS OF TITANIUM SILICIDE FORMATION BY RAPID THERMAL-PROCESSING [J]. FRESENIUS ZEITSCHRIFT FUR ANALYTISCHE CHEMIE, 1989, 333 (4-5): : 569 - 575
- [5] PROCESS-CONTROL OF TITANIUM SILICIDE FORMATION USING RAPID THERMAL-PROCESSING [J]. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1987, 21 (2-4): : 633 - 637
- [6] TITANIUM SILICIDES FORMED BY RAPID THERMAL VACUUM PROCESSING [J]. JOURNAL OF APPLIED PHYSICS, 1988, 63 (06) : 2171 - 2173
- [7] FORMATION OF PALLADIUM AND TITANIUM SILICIDES BY RAPID THERMAL ANNEALING [J]. PHYSICA B & C, 1985, 129 (1-3): : 205 - 209
- [8] PLATINUM SILICIDE FORMATION USING RAPID THERMAL-PROCESSING [J]. JOURNAL OF APPLIED PHYSICS, 1988, 64 (08) : 4161 - 4167
- [10] MODELING OF RAPID THERMAL-PROCESSING [J]. MICROELECTRONIC ENGINEERING, 1991, 10 (3-4) : 207 - 216