PARAMETRIC INVESTIGATION OF THE SHEATH POTENTIAL IN A LOW-FREQUENCY RF DISCHARGE

被引：19
|
作者：
CHAN, C [1 ]
JIN, ZJ [1 ]
WHITAKER, C [1 ]
机构：
[1] NORTHEASTERN UNIV,DEPT ELECT & COMP ENGN,BOSTON,MA 02115
来源：
JOURNAL OF APPLIED PHYSICS | 1987年 / 62卷 / 05期
关键词：
D O I：
10.1063/1.339587
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
收藏
页码：1633 / 1638
页数：6
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