PARAMETRIC INVESTIGATION OF THE SHEATH POTENTIAL IN A LOW-FREQUENCY RF DISCHARGE

被引：19

作者：

CHAN, C ^{[1
]}

JIN, ZJ ^{[1
]}

WHITAKER, C ^{[1
]}

机构：

[1] NORTHEASTERN UNIV,DEPT ELECT & COMP ENGN,BOSTON,MA 02115

来源：

JOURNAL OF APPLIED PHYSICS | 1987年 / 62卷 / 05期

关键词：

D O I：

10.1063/1.339587

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：1633 / 1638

页数：6

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