ENHANCED TAIL DIFFUSION OF PHOSPHORUS AND BORON IN SILICON - SELF-INTERSTITIAL PHENOMENA

被引：95
|
作者：
MOREHEAD, FF [1 ]
LEVER, RF [1 ]
机构：
[1] IBM CORP,GTD DIV,HOPEWELL JUNCTION,NY 12533
来源：
APPLIED PHYSICS LETTERS | 1986年 / 48卷 / 02期
关键词：
D O I：
10.1063/1.96980
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
收藏
页码：151 / 153
页数：3
相关论文
共 50 条
  • [41] Self-interstitial migration during ion irradiation of boron delta-doped silicon
    Kuznetsov, AY
    Lévêque, P
    Hallén, A
    Svensson, BG
    Larsen, AN
    MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING, 2000, 3 (04) : 279 - 283
  • [42] Effects of interstitial clustering on transient enhanced diffusion of Boron in silicon
    Solmi, S
    Valmorri, S
    MATERIALS MODIFICATION AND SYNTHESIS BY ION BEAM PROCESSING, 1997, 438 : 95 - 100
  • [43] Effects of interstitial clustering on transient enhanced diffusion of boron in silicon
    Solmi, S
    Valmorri, S
    MICROSTRUCTURE EVOLUTION DURING IRRADIATION, 1997, 439 : 65 - 70
  • [44] Unexpected dynamics for self-interstitial clusters in silicon
    Estreicher, SK
    Gharaibeh, M
    Fedders, PA
    Ordejon, P
    PHYSICAL REVIEW LETTERS, 2001, 86 (07) : 1247 - 1250
  • [45] THE PIPE DIFFUSION OF THE SELF-INTERSTITIAL IN A LOADED CRYSTAL
    KOLOMYTKIN, VV
    PHYSICA STATUS SOLIDI A-APPLIED RESEARCH, 1987, 100 (01): : K17 - K20
  • [46] MULTIVACANCIES, INTERSTITIALS, AND SELF-INTERSTITIAL MIGRATION IN SILICON
    PANTELIDES, ST
    IVANOV, I
    SCHEFFLER, M
    VIGNERON, JP
    PHYSICA B & C, 1983, 116 (1-3): : 18 - 27
  • [47] Self-interstitial kinetics and transient phenomena in Si crystals
    La Magna, A
    Coffa, S
    Libertino, S
    Strobel, M
    Colombo, L
    GETTERING AND DEFECT ENGINEERING IN SEMICONDUCTOR TECHNOLOGY, 2002, 82-84 : 171 - 176
  • [48] Complexity of small silicon self-interstitial defects
    Richie, DA
    Kim, J
    Barr, SA
    Hazzard, KRA
    Hennig, R
    Wilkins, JW
    PHYSICAL REVIEW LETTERS, 2004, 92 (04) : 4 - 455014
  • [49] Dynamics of self-interstitial cluster formation in silicon
    Chichkine, MP
    De Souza, MM
    PHYSICAL REVIEW B, 2002, 66 (04):
  • [50] Ab initio calculations of the self-interstitial in silicon
    Clark, SJ
    Ackland, GJ
    PHYSICAL REVIEW B, 1997, 56 (01): : 47 - 50
12345