Young's modulus characterization of low-k films of nanoporous Black Diamond (TM) by surface acoustic waves

被引：3
|
作者：
Shan Xingmeng [1 ]
Xiao Xia [1 ]
Liu Yaliang [1 ]
机构：
[1] Tianjin Univ, Sch Elect & Informat Engn, Tianjin 300072, Peoples R China
来源：
JOURNAL OF SEMICONDUCTORS | 2010年 / 31卷 / 08期
基金：
中国国家自然科学基金;
关键词：
ULSI interconnect; SAWs; Young's modulus; Black Diamond (TM); nanoporous low-k film;
D O I：
10.1088/1674-4926/31/8/082002
中图分类号：
O469 [凝聚态物理学];
学科分类号：
070205 ;
摘要：
The laser-generated surface acoustic wave (SAW) technique is an accurate, fast and nondestructive solution to determine the mechanical properties of ultra thin films. SAWs are dispersive during the wave propagation on the layered structure. The Young's moduli of thin films can be obtained by matching the experimentally and theoretically calculated dispersive SAW curves. A short ultraviolet laser pulse is employed to generate the broad spectral range of the dispersive SAWs. The frequency range of dispersive SAWs in this study reaches 180 MHz, which is adequate for the SAW technique applied for the investigated samples. In this work, the Young's moduli of a series of nanoporous Black DiamondTM low dielectric constant (low-k/films deposited on a Si (100) substrate are characterized successfully by the SAW technique.
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页数：5
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