Young's modulus characterization of low-k films of nanoporous Black Diamond (TM) by surface acoustic waves

被引：3
|
作者：
Shan Xingmeng [1 ]
Xiao Xia [1 ]
Liu Yaliang [1 ]
机构：
[1] Tianjin Univ, Sch Elect & Informat Engn, Tianjin 300072, Peoples R China
来源：
JOURNAL OF SEMICONDUCTORS | 2010年 / 31卷 / 08期
基金：
中国国家自然科学基金;
关键词：
ULSI interconnect; SAWs; Young's modulus; Black Diamond (TM); nanoporous low-k film;
D O I：
10.1088/1674-4926/31/8/082002
中图分类号：
O469 [凝聚态物理学];
学科分类号：
070205 ;
摘要：
The laser-generated surface acoustic wave (SAW) technique is an accurate, fast and nondestructive solution to determine the mechanical properties of ultra thin films. SAWs are dispersive during the wave propagation on the layered structure. The Young's moduli of thin films can be obtained by matching the experimentally and theoretically calculated dispersive SAW curves. A short ultraviolet laser pulse is employed to generate the broad spectral range of the dispersive SAWs. The frequency range of dispersive SAWs in this study reaches 180 MHz, which is adequate for the SAW technique applied for the investigated samples. In this work, the Young's moduli of a series of nanoporous Black DiamondTM low dielectric constant (low-k/films deposited on a Si (100) substrate are characterized successfully by the SAW technique.
引用
收藏
页数：5
相关论文
共 50 条
  • [31] Surface Acoustic Waves as a technique for in-line detection of processing damage to low-k dielectrics
    Iacopi, F
    Brongersma, SH
    Mazurenko, A
    Struyf, H
    Mannaert, G
    Travaly, Y
    Maznev, A
    Abell, TJ
    Tower, J
    Maex, K
    PROCEEDINGS OF THE IEEE 2005 INTERNATIONAL INTERCONNECT TECHNOLOGY CONFERENCE, 2005, : 217 - 219
  • [32] Characterization of nanoporous low-k thin films by small-angle neutron scattering contrast variation
    Hedden, RC
    Lee, HJ
    Bauer, BJ
    LANGMUIR, 2004, 20 (02) : 416 - 422
  • [33] TI votes for AMAT's Black Diamond CVD low-k; IBM uses SILK
    不详
    SOLID STATE TECHNOLOGY, 2000, 43 (06) : 46 - 46
  • [34] Determination of Young's modulus and yield strength of porous low-k dielectric films by nanoindentation under complete consideration of the substrate influence
    Herrmann, M.
    Richter, F.
    INTERNATIONAL JOURNAL OF SURFACE SCIENCE AND ENGINEERING, 2009, 3 (1-2) : 64 - 85
  • [35] Evaluation and criterion determination of the low-k thin film adhesion by the surface acoustic waves with cohesive zone model
    Xiao, Xia
    Qi, Haiyang
    Sui, Xiaole
    Kikkawa, Takamaro
    APPLIED SURFACE SCIENCE, 2017, 399 : 599 - 607
  • [36] Study on the interfacial adhesion property of low-k thin film by the surface acoustic waves with cohesive zone model
    Xiao, Xia
    Qi, Haiyang
    Tao, Ye
    Kikkawa, Takamaro
    APPLIED SURFACE SCIENCE, 2016, 388 : 448 - 454
  • [37] Acoustic Phonons and Mechanical Properties of Ultra-Thin Porous Low-k Films: A Surface Brillouin Scattering Study
    Zizka, J.
    King, S.
    Every, A.
    Sooryakumar, R.
    JOURNAL OF ELECTRONIC MATERIALS, 2018, 47 (07) : 3942 - 3950
  • [38] Acoustic Phonons and Mechanical Properties of Ultra-Thin Porous Low-k Films: A Surface Brillouin Scattering Study
    J. Zizka
    S. King
    A. Every
    R. Sooryakumar
    Journal of Electronic Materials, 2018, 47 : 3942 - 3950
  • [39] Influence of residual stress on the determination of Young's modulus for SiO2 thin film by the surface acoustic waves
    Qin, Huiquan
    Xiao, Xia
    Sui, Xiaole
    Qi, Haiyang
    JAPANESE JOURNAL OF APPLIED PHYSICS, 2019, 58 (SH)
  • [40] FOCUSED ACOUSTIC BEAM IMAGING OF GRAIN STRUCTURE AND LOCAL YOUNG'S MODULUS WITH RAYLEIGH AND SURFACE SKIMMING LONGITUDINAL WAVES
    Martin, R. W.
    Sathish, S.
    Blodgett, M. P.
    REVIEW OF PROGRESS IN QUANTITATIVE NONDESTRUCTIVE EVALUATION, VOLS 32A AND 32B, 2013, 1511 : 1133 - 1138
12345