INTERFACE STRUCTURE OF GE/SI(111) DURING SOLID-PHASE EPITAXY STUDIED BY MEDIUM-ENERGY ION-SCATTERING

被引：21
|
作者：
SUMITOMO, K
NISHIOKA, T
SHIMIZU, N
SHINODA, Y
OGINO, T
机构：
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A | 1995年 / 13卷 / 02期
关键词：
D O I：
10.1116/1.579412
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
引用
收藏
页码：289 / 294
页数：6
相关论文
共 50 条
  • [31] MONOLAYER RESOLUTION IN MEDIUM-ENERGY ION-SCATTERING EXPERIMENTS ON THE NISI2(111) SURFACE
    VRIJMOETH, J
    ZAGWIJN, PM
    FRENKEN, JWM
    VANDERVEEN, JF
    PHYSICAL REVIEW LETTERS, 1991, 67 (09) : 1134 - 1137
  • [32] MEDIUM-ENERGY ION-SCATTERING ANALYSIS OF THE CU(110) SURFACE
    COPEL, M
    GUSTAFSSON, T
    GRAHAM, WR
    YALISOVE, SM
    PHYSICAL REVIEW B, 1986, 33 (12): : 8110 - 8115
  • [33] GEOMETRIC STRUCTURE AND SURFACE VIBRATIONS OF CU(001) DETERMINED BY MEDIUM-ENERGY ION-SCATTERING
    JIANG, QT
    FENTER, P
    GUSTAFSSON, T
    PHYSICAL REVIEW B, 1991, 44 (11): : 5773 - 5778
  • [34] MEDIUM-ENERGY ION-SCATTERING STUDIES OF THE STRUCTURE OF SOME RECONSTRUCTED METAL-SURFACES
    GUSTAFSSON, T
    FENTER, P
    HABERLE, P
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1990, 45 (1-4): : 398 - 402
  • [35] EVALUATION OF PLASMA-INDUCED DAMAGE BY MEDIUM-ENERGY ION-SCATTERING
    YOKOYAMA, S
    RADZIMSKI, ZJ
    ISHIBASHI, K
    MIYAZAKI, S
    HIROSE, M
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1994, 33 (4B): : 2179 - 2183
  • [36] MEDIUM-ENERGY ION-SCATTERING STUDIES OF RELAXATION AT METAL-SURFACES
    YALISOVE, SM
    GRAHAM, WR
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 1988, 6 (03): : 588 - 596
  • [37] Structure analysis of Ge dimer on Si(001) by medium-energy ion scattering blocking profiles from embedded Ge layers
    Sumitomo, K
    Nishioka, T
    Ogino, T
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 1997, 15 (03): : 1537 - 1541
  • [38] SCANNING-TUNNELING-MICROSCOPY OBSERVATIONS OF GE SOLID-PHASE EPITAXY ON SI(111)
    HIBINO, H
    OGINO, T
    APPLIED SURFACE SCIENCE, 1994, 82-3 : 374 - 379
  • [39] Structure analysis of Ge dimer on Si (001) by medium-energy ion scattering blocking profiles from embedded Ge layers
    Sumitomo, Koji
    Nishioka, Takashi
    Ogino, Toshio
    Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films, 1997, 15 (3 Pt 1): : 1537 - 1541
  • [40] COMPOSITION, STRUCTURE, AND MORPHOLOGY FOR AG DEPOSITION ON CU(110) - A MEDIUM-ENERGY ION-SCATTERING STUDY
    TAYLOR, TN
    VANDERGON, AWD
    VANDERVEEN, JF
    PHYSICAL REVIEW B, 1990, 41 (11): : 7474 - 7482
12345