COMPOUND BRAGG REFLECTION FILTERS MADE BY SPATIAL-FREQUENCY DOUBLING LITHOGRAPHY

被引：20
|
作者：
HENRY, CH [1 ]
SHANI, Y [1 ]
KISTLER, RC [1 ]
JEWELL, TE [1 ]
POL, V [1 ]
OLSSON, NA [1 ]
KAZARINOV, RF [1 ]
ORLOWSKY, KJ [1 ]
机构：
[1] AT&T BELL LABS,DEPT LITHOGRAPH TECHNOL,MURRAY HILL,NJ 07974
来源：
JOURNAL OF LIGHTWAVE TECHNOLOGY | 1989年 / 7卷 / 09期
关键词：
D O I：
10.1109/50.50717
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
引用
收藏
页码：1379 / 1385
页数：7
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