COMPOUND BRAGG REFLECTION FILTERS MADE BY SPATIAL-FREQUENCY DOUBLING LITHOGRAPHY

被引：20

作者：

HENRY, CH ^{[1
]}

SHANI, Y ^{[1
]}

KISTLER, RC ^{[1
]}

JEWELL, TE ^{[1
]}

POL, V ^{[1
]}

OLSSON, NA ^{[1
]}

KAZARINOV, RF ^{[1
]}

ORLOWSKY, KJ ^{[1
]}

机构：

[1] AT&T BELL LABS,DEPT LITHOGRAPH TECHNOL,MURRAY HILL,NJ 07974

来源：

JOURNAL OF LIGHTWAVE TECHNOLOGY | 1989年 / 7卷 / 09期

关键词：

D O I：

10.1109/50.50717

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：1379 / 1385

页数：7

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