DETERMINATION OF THE OPTICAL-THICKNESS AND OF THE FILLING FACTOR OF DISCONTINUOUS AU FILMS FROM PHOTOMETRIC AND ELLIPSOMETRIC MEASUREMENTS

被引:8
|
作者
ELIZALDE, E [1 ]
GADENNE, P [1 ]
THEYE, ML [1 ]
机构
[1] UNIV PIERRE & MARIE CURIE,CNRS,OPT SOLIDES LAB 781,F-75252 PARIS 05,FRANCE
关键词
D O I
10.1016/0030-4018(86)90076-3
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
引用
收藏
页码:378 / 382
页数:5
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