ENHANCEMENT OF NOBLE GAS PUMPING FOR A SPUTTER-ION PUMP

被引：0
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作者：
KOMIYA, S
YAGI, N
HAYASHI, C
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来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1968年 / 5卷 / 05期
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O59 [应用物理学];
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页码：170 / &
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