ENHANCEMENT OF NOBLE GAS PUMPING FOR A SPUTTER-ION PUMP

被引：0

作者：

KOMIYA, S

YAGI, N

HAYASHI, C

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来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1968年 / 5卷 / 05期

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中图分类号：

O59 [应用物理学];

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引用

页码：170 / &

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