GAINP AND ALINP GROWN BY ELEMENTAL SOURCE MOLECULAR-BEAM EPITAXY

被引:13
|
作者
VARRIANO, JA
KOCH, MW
JOHNSON, FG
WICKS, GW
机构
[1] The Institute of Optics, University of Rochester, Rochester, 14627, New York
关键词
MOLECULAR BEAM EPITAXY; GAINP; ALINP;
D O I
10.1007/BF02655836
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
We report on the use of a new, valved, solid phosphorus cracker source for the growth of phosphides by molecular beam epitaxy. The source avoids the relatively high expense and high level of toxicity associated with the use of phosphine gas and eliminates the problems commonly encountered in using conventional solid phosphorus sources. The source has been used to grow GaInP and AlInP lattice-matched to GaAs substrates. The quality of the materials reported here is comparable to the best materials grown by other techniques. Photoluminescence and Raman scattering measurements indicate that the resulting material has a high degree of disorder on the group III sublattice. The new source is shown to be a reliable and attractive alternative for the growth of these phosphide materials.
引用
收藏
页码:195 / 198
页数:4
相关论文
共 50 条
  • [31] CHARACTERIZATION OF HIGH-QUALITY GAINP/GAAS SUPERLATTICES GROWN ON GAAS AND SI SUBSTRATES BY GAS-SOURCE MOLECULAR-BEAM EPITAXY
    JELEN, C
    SLIVKEN, S
    HE, XG
    RAZEGHI, M
    SHASTRY, S
    [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1994, 12 (02): : 1113 - 1115
  • [32] STRAINED-LAYER INGAAS/GAINASP/GAINP QUANTUM-WELL LASERS GROWN BY GAS-SOURCE MOLECULAR-BEAM EPITAXY
    ZHANG, G
    [J]. APPLIED PHYSICS LETTERS, 1993, 62 (12) : 1405 - 1407
  • [33] Interface optimization of AlInP/GaAs multiple quantum wells-grown by gas source molecular beam epitaxy
    Kuo, JM
    Kuo, HC
    Cheng, JY
    Wang, YC
    Lu, Y
    Mayo, WE
    [J]. JOURNAL OF CRYSTAL GROWTH, 1996, 158 (04) : 393 - 398
  • [34] A silicon sublimation source for molecular-beam epitaxy
    Shengurov, V. G.
    Denisov, S. A.
    Chalkov, V. Yu.
    Shengurov, D. V.
    [J]. INSTRUMENTS AND EXPERIMENTAL TECHNIQUES, 2016, 59 (03) : 466 - 469
  • [35] GAS-SOURCE MOLECULAR-BEAM EPITAXY
    PANISH, MB
    TEMKIN, H
    [J]. ANNUAL REVIEW OF MATERIALS SCIENCE, 1989, 19 : 209 - 229
  • [36] A silicon sublimation source for molecular-beam epitaxy
    V. G. Shengurov
    S. A. Denisov
    V. Yu. Chalkov
    D. V. Shengurov
    [J]. Instruments and Experimental Techniques, 2016, 59 : 466 - 469
  • [37] ALGASB/GASB DIODES GROWN BY MOLECULAR-BEAM EPITAXY
    LONGENBACH, KF
    WANG, WI
    [J]. APPLIED PHYSICS LETTERS, 1991, 59 (09) : 1117 - 1119
  • [38] SEGREGATED ALGAAS(110) GROWN BY MOLECULAR-BEAM EPITAXY
    WANG, WI
    KUAN, TS
    TSANG, JC
    CHANG, LL
    ESAKI, L
    [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1986, 4 (02): : 517 - 518
  • [39] HGTE/CDTE SUPERLATTICES GROWN BY MOLECULAR-BEAM EPITAXY
    FAURIE, JP
    BOUKERCHE, M
    SIVANANTHAN, S
    RENO, J
    HSU, C
    [J]. SUPERLATTICES AND MICROSTRUCTURES, 1985, 1 (03) : 237 - 244
  • [40] ALGAAS DOPING SUPERLATTICES GROWN BY MOLECULAR-BEAM EPITAXY
    ACKLEY, DE
    LEE, H
    NOURI, N
    COLVARD, C
    [J]. APPLIED PHYSICS LETTERS, 1988, 52 (22) : 1883 - 1885