Interface optimization of AlInP/GaAs multiple quantum wells-grown by gas source molecular beam epitaxy

被引:7
|
作者
Kuo, JM
Kuo, HC
Cheng, JY
Wang, YC
Lu, Y
Mayo, WE
机构
[1] RUTGERS STATE UNIV,DEPT ELECT & COMP ENGN,PISCATAWAY,NJ 08855
[2] RUTGERS STATE UNIV,DEPT MECH & MAT SCI,PISCATAWAY,NJ 08855
关键词
D O I
10.1016/0022-0248(95)00469-6
中图分类号
O7 [晶体学];
学科分类号
0702 ; 070205 ; 0703 ; 080501 ;
摘要
We present a source switching procedure for the growth of abrupt interfaces in AIInP/GaAs multiple quantum well heterostructures grown by gas source molecular beam epitaxy. The switching procedures were optimized through characterization by cathodoluminescence, room temperature absorption, double crystal X-ray diffraction and dynamic Simulation, and high resolution transmission electron microscopy. Atomically flat AIInP-on-GaAs and GaAs-on-AIInP interfaces were obtained by avoiding exposure of the GaAs surface to phosphorous before the growth of AIInP and by optimizing the pump-out intervals of the residual A(2) and P-2 between layers. The optimum pump-out interval was determined to be 20 s for As-2, and 10 s for P-2.
引用
收藏
页码:393 / 398
页数:6
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