THEORETICAL CONSIDERATIONS IN LATERAL DAMAGE DISTRIBUTION FORMED BY ION-IMPLANTATION

被引：12
|
作者：
MATSUMURA, H [1 ]
FURUKAWA, S [1 ]
机构：
[1] TOKYO INST TECHNOL,FAC COORDINATED SCI,DEPT ELECTR & SYST,YOKOHAMA,JAPAN
来源：
JAPANESE JOURNAL OF APPLIED PHYSICS | 1975年 / 14卷 / 11期
关键词：
D O I：
10.1143/JJAP.14.1783
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
收藏
页码：1783 / 1790
页数：8
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