DAMAGE IN GALLIUM-ARSENIDE CRYSTALS PRODUCED BY ION-IMPLANTATION, ABRASION AND BALL-MILLING

被引:5
|
作者
TUNKASIRI, T [1 ]
LEWIS, D [1 ]
机构
[1] UNIV SURREY,CHEM PHYS DEPT,GUILDFORD,ENGLAND
关键词
D O I
10.1007/BF00540827
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
引用
收藏
页码:1367 / 1374
页数:8
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