COMPUTER-SIMULATIONS OF SPUTTERING

被引：286

作者：

BIERSACK, JP

机构：

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1987年 / 27卷 / 01期

关键词：

D O I：

10.1016/0168-583X(87)90005-X

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：21 / 36

页数：16

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