SURFACE-MORPHOLOGY OF LEAD-BASED THIN-FILMS AND THEIR PROPERTIES

被引：55

作者：

ATSUKI, T ^{[1
]}

SOYAMA, N ^{[1
]}

SASAKI, G ^{[1
]}

YONEZAWA, T ^{[1
]}

OGI, K ^{[1
]}

SAMESHIMA, K ^{[1
]}

HOSHIBA, K ^{[1
]}

NAKAO, Y ^{[1
]}

KAMISAWA, A ^{[1
]}

机构：

[1] ROHM CO LTD, UKYO KU, KYOTO 615, JAPAN

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS | 1994年 / 33卷 / 9B期

关键词：

FERROELECTRIC; PZT; THIN FILMS; SURFACE MORPHOLOGY; SOL-GEL;

D O I：

10.1143/JJAP.33.5196

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Surface morphology of lead-zirconate-titanate [PZT(52/48)] thin films prepared by sol-gel processing on Pt/Ti/ SiO2/Si substrates was studied. When the atomic ratio [Pb/(Zr + Ti)] of PZT gel films was 1, rosette structure was observed in the films after annealing at 600 degrees C for one hour. The crystal structure of the rosette was identified as perovskite and that of the other area was nonperovskite, by electron diffraction analysis. Lead deficiency in the non-perovskite phase caused by lead diffusion into the bottom electrode was detected by energy dispersive X-ray spectroscopy and Auger electron spectroscopy. In order to prepare PZT films with a smooth surface, the following four means were efficient: addition of lead excess, rapid thermal annealing (RTA), adoption of buffer layer, and preparation of crystal nucleus on the substrate.

引用

页码：5196 / 5200

页数：5

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