WET ETCHING OF PROTON-EXCHANGED LITHIUM-NIOBATE - A NOVEL PROCESSING TECHNIQUE

被引：74

作者：

LAURELL, F

WEBJORN, J

ARVIDSSON, G

HOLMBERG, J

机构：

[1] Institute of Optical Research, S-100 44, Stockholm

来源：

JOURNAL OF LIGHTWAVE TECHNOLOGY | 1992年 / 10卷 / 11期

关键词：

D O I：

10.1109/50.184899

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A new and simple method to etch lithium niobate is reported. We have found that proton exchanged areas on the c+-face of the crystal can be etched away using a mixture of HF:HNO3 while the unexchanged regions are left untouched. The method can be used as a tool for studies of the proton exchange process, as well as to form three-dimensional structures.

引用

页码：1606 / 1609

页数：4

共 50 条

[31] Metastable phases in proton-exchanged waveguides on an X cut of lithium niobate
Shevtsov, DI
Azanova, IS
Taisin, IF
Volyntsev, AB
[J]. PHYSICS OF THE SOLID STATE, 2006, 48 (06) : 1059 - 1063
[32] Metastable phases in proton-exchanged waveguides on an X cut of lithium niobate
D. I. Shevtsov
I. S. Azanova
I. F. Taĭsin
A. B. Volyntsev
[J]. Physics of the Solid State, 2006, 48 : 1059 - 1063
[33] SURFACE-WAVE STUDIES OF ANNEALED PROTON EXCHANGED LITHIUM-NIOBATE
HICKERNELL, FS
JOSEPH, SJ
RUEHLE, KR
[J]. IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL, 1986, 33 (06) : 796 - 796
[34] THE SURFACE ACOUSTIC-WAVE PROPERTIES OF PROTON EXCHANGED LITHIUM-NIOBATE
HICKERNELL, FS
RUEHLE, KD
JOSEPH, SJ
REESE, GM
WELLER, JF
[J]. IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL, 1986, 33 (01) : 110 - 110
[35] Aging effect in proton-exchanged optical waveguides based on lithium niobate crystals
A. V. Zhundrikov
V. I. Kichigin
I. S. Azanova
D. I. Shevtsov
I. V. Petukhov
[J]. Physics of the Solid State, 2009, 51 : 1541 - 1543
[36] Structural phase transformations of proton-exchanged layers of lithium niobate during annealing
Mushinsky, S. S.
Kichigin, V. I.
Petukhov, I. V.
Permyakova, M. A.
Shevtsov, D. I.
[J]. FERROELECTRICS, 2017, 508 (01) : 40 - 48
[37] LITHIUM-NIOBATE RIDGE WAVE-GUIDES FABRICATED BY WET ETCHING
LEE, HJ
SHIN, SY
[J]. ELECTRONICS LETTERS, 1995, 31 (04) : 268 - 269
[38] Research on proton-exchanged lithium niobate waveguides for Cerenkov second harmonic generation
Chen, XF
Xie, SW
Zhong, XX
Xia, YX
Chen, YL
[J]. 1999 INTERNATIONAL CONFERENCE ON INDUSTRIAL LASERS (IL'99), 1999, 3862 : 205 - 209
[39] Aging effect in proton-exchanged optical waveguides based on lithium niobate crystals
Zhundrikov, A. V.
Kichigin, V. I.
Azanova, I. S.
Shevtsov, D. I.
Petukhov, I. V.
[J]. PHYSICS OF THE SOLID STATE, 2009, 51 (07) : 1541 - 1543
[40] Design of configurable photonic multiplexer using proton-exchanged lithium niobate on insulator
Meerasha, Mubarak Ali
Meetei, Toijam Sunder
Pandiyan, Krishnamoorthy
[J]. MICROWAVE AND OPTICAL TECHNOLOGY LETTERS, 2020, 62 (09) : 3077 - 3086

← 1 2 3 4 5 →