WET ETCHING OF PROTON-EXCHANGED LITHIUM-NIOBATE - A NOVEL PROCESSING TECHNIQUE

被引：74

作者：

LAURELL, F

WEBJORN, J

ARVIDSSON, G

HOLMBERG, J

机构：

[1] Institute of Optical Research, S-100 44, Stockholm

来源：

JOURNAL OF LIGHTWAVE TECHNOLOGY | 1992年 / 10卷 / 11期

关键词：

D O I：

10.1109/50.184899

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A new and simple method to etch lithium niobate is reported. We have found that proton exchanged areas on the c+-face of the crystal can be etched away using a mixture of HF:HNO3 while the unexchanged regions are left untouched. The method can be used as a tool for studies of the proton exchange process, as well as to form three-dimensional structures.

引用

页码：1606 / 1609

页数：4

共 50 条

[21] Research of selective etching in Linbo3 using proton-exchanged wet etching technique
Li, Ying
Lan, Tian
Yang, Dengcai
Xiang, Meihua
Dai, Jingjing
Li, Chong
Wang, Zhiyong
[J]. MATERIALS RESEARCH EXPRESS, 2020, 7 (05)
[22] PHOTOREFRACTIVE EFFECT IN PROTON-EXCHANGED WAVE-GUIDING LAYERS FORMED ON LITHIUM-NIOBATE AND LITHIUM TANTALATE CRYSTALS
KONDO, Y
FUJII, Y
[J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 1995, 34 (3A): : L309 - L311
[23] CERENKOV 2ND-HARMONIC GENERATION IN PROTON-EXCHANGED LITHIUM-NIOBATE WAVE-GUIDES
KEYS, RW
LONI, A
DELARUE, RM
[J]. JOURNAL OF MODERN OPTICS, 1990, 37 (04) : 545 - 553
[24] BEAM-PROPAGATION ANALYSIS OF A TAPERED PROTON-EXCHANGED LITHIUM-NIOBATE OPTICAL WAVE-GUIDE
WEI, PK
LIU, HY
WANG, WS
[J]. IEEE MICROWAVE AND GUIDED WAVE LETTERS, 1994, 4 (02): : 40 - 42
[25] Characteristics of hybrid modes in proton-exchanged lithium niobate waveguides
Tartarini, Giovanni
Bassi, Paolo
Baldi, Pascal
De Micheli, Marc P.
Ostrowsky, Daniel B.
[J]. Applied Optics, 1995, 34 (18): : 3441 - 3448
[26] Hydrogen diffusion in proton-exchanged lithium niobate single crystals
Doerrer, Lars
Tuchel, Philipp
Hueger, Erwin
Heller, Rene
Schmidt, Harald
[J]. JOURNAL OF APPLIED PHYSICS, 2021, 129 (13)
[27] Reduction of lattice defects in proton-exchanged lithium niobate waveguides
Muller, Heinrich G.
Stapleton, Andrew D.
Foran, Brendan J.
Radhakrishnan, Gouri
Kim, Hyun I.
Adams, Paul M.
Lipeles, Russell A.
Herman, Paul
[J]. JOURNAL OF APPLIED PHYSICS, 2011, 110 (03)
[28] THE EFFECTS OF FINITE MELT VOLUME ON PROTON EXCHANGED LITHIUM-NIOBATE
VOHRA, ST
MICKELSON, AR
[J]. JOURNAL OF LIGHTWAVE TECHNOLOGY, 1988, 6 (12) : 1848 - 1853
[29] Microstructure and relaxation of Raman selection rules in proton-exchanged lithium niobate
Zhang, MS
Yin, Z
Wu, XL
Feng, D
Chen, S
[J]. JOURNAL OF THE KOREAN PHYSICAL SOCIETY, 1998, 32 : S146 - S148
[30] Proton-exchanged wet etching of recessed-structure SAW filter
Tsai, SH
Wang, NF
Houng, MP
Wang, YH
[J]. IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL, 2003, 50 (09) : 1219 - 1222

← 1 2 3 4 5 →