WET ETCHING OF PROTON-EXCHANGED LITHIUM-NIOBATE - A NOVEL PROCESSING TECHNIQUE

被引：74

作者：

LAURELL, F

WEBJORN, J

ARVIDSSON, G

HOLMBERG, J

机构：

[1] Institute of Optical Research, S-100 44, Stockholm

来源：

JOURNAL OF LIGHTWAVE TECHNOLOGY | 1992年 / 10卷 / 11期

关键词：

D O I：

10.1109/50.184899

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A new and simple method to etch lithium niobate is reported. We have found that proton exchanged areas on the c+-face of the crystal can be etched away using a mixture of HF:HNO3 while the unexchanged regions are left untouched. The method can be used as a tool for studies of the proton exchange process, as well as to form three-dimensional structures.

引用

页码：1606 / 1609

页数：4

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