EFFECTS OF SUBSTRATE-TEMPERATURE ON THE ORIENTATION OF ULTRAHIGH-VACUUM EVAPORATE SI AND GE FILMS

被引：17

作者：

CHAO, SS ^{[1
]}

GONZALEZHERNANDEZ, J ^{[1
]}

MARTIN, D ^{[1
]}

TSU, R ^{[1
]}

机构：

[1] INST FIS & QUIM SAO CARLOS,BR-13560 SAO CARLOS,SP,BRAZIL

来源：

APPLIED PHYSICS LETTERS | 1985年 / 46卷 / 11期

关键词：

D O I：

10.1063/1.95771

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：1089 / 1091

页数：3

共 50 条

[21] Interfacial study of Si-Ge multilayers grown using ultrahigh-vacuum chemical vapor deposition
Lian, Derming
Wen, Hua-Chiang
INTERNATIONAL JOURNAL OF MATERIALS RESEARCH, 2013, 104 (06) : 542 - 546
[22] ABRUPTNESS OF GE COMPOSITION AT THE SI/SIGE INTERFACE GROWN BY ULTRAHIGH-VACUUM CHEMICAL-VAPOR-DEPOSITION
TSAI, WC
CHANG, CY
JUNG, TG
LIOU, TS
HUANG, GW
CHANG, TC
CHEN, LP
LIN, HC
APPLIED PHYSICS LETTERS, 1995, 67 (08) : 1092 - 1094
[23] Effects of substrate temperature on thermoelectric properties of amorphous Si/Ge thin films
Lee, SM
Okamoto, Y
Kawahara, T
Morimoto, J
TWENTIETH INTERNATIONAL CONFERENCE ON THERMOELECTRICS, PROCEEDINGS, 2001, : 348 - 351
[24] EFFECTS OF SUBSTRATE-TEMPERATURE AND SUBSTRATE MATERIAL ON THE STRUCTURE OF REACTIVELY SPUTTERED TIN FILMS
HIBBS, MK
JOHANSSON, BO
SUNDGREN, JE
HELMERSSON, U
THIN SOLID FILMS, 1984, 122 (02) : 115 - 129
[25] FORMATION OF AMORPHOUS INTERLAYERS IN ULTRAHIGH-VACUUM DEPOSITED YTTRIUM THIN-FILMS ON (111)SI
LEE, TL
CHEN, LJ
JOURNAL OF APPLIED PHYSICS, 1993, 73 (10) : 5280 - 5282
[26] INTERFACIAL REACTIONS IN ULTRAHIGH-VACUUM DEPOSITED Y-SI MULTILAYER THIN-FILMS
LEE, TL
CHEN, LJ
JOURNAL OF APPLIED PHYSICS, 1994, 75 (04) : 2007 - 2014
[27] THE EFFECT OF SUBSTRATE-TEMPERATURE ON THE MAGNETIC AND STRUCTURAL-PROPERTIES OF NI-FE THIN-FILMS DEPOSITED IN ULTRAHIGH AND ORDINARY VACUUM
CHAPMAN, VB
MARWAHA, AS
COLLINS, AJ
THIN SOLID FILMS, 1981, 76 (01) : 77 - 82
[28] Interfacial reactions of ultrahigh-vacuum-deposited Cu thin films on Si, Ge and on epitaxial Si-Ge layers on Si and Ge
Chen, LJ
Liu, CS
Lai, JB
MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING, 2004, 7 (03) : 143 - 156
[29] THICKNESS UNIFORMITY OF EVAPORATED FILMS PREPARED IN STANDARD AND ULTRAHIGH-VACUUM
BENNETT, JM
ASHLEY, EJ
JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1972, 62 (05) : 719 - &
[30] EFFECTS OF SPEED, FILM THICKNESS AND SUBSTRATE SURFACE-ROUGHNESS ON FRICTION AND WEAR OF SOFT METAL-FILMS IN ULTRAHIGH-VACUUM
ARNELL, RD
SOLIMAN, FA
THIN SOLID FILMS, 1978, 53 (03) : 333 - 341

← 1 2 3 4 5 →