CRYSTALLOGRAPHIC DEFECT STUDIES IN SIMOX MATERIAL THINNED BY SACRIFICIAL OXIDATION

被引：5

作者：

GILES, LF ^{[1
]}

MARSH, CD ^{[1
]}

NEJIM, A ^{[1
]}

HEMMENT, PLF ^{[1
]}

BOOKER, GR ^{[1
]}

机构：

[1] UNIV OXFORD,DEPT MAT,OXFORD OX1 3PH,ENGLAND

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1994年 / 84卷 / 02期

关键词：

D O I：

10.1016/0168-583X(94)95763-0

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

Crystallographic defects present in thermal oxidised SIMOX materials have been studied by means of plan view transmission electron microscopy (TEM) and chemical defect etching. It is observed that the presence of small stacking fault tetrahedra near the top Si/SiO2 interface influence the formation of oxidation induced stacking faults (OISF). An explanation for this behaviour is given based on the assumption that these small crystallographic defects contribute to the recombination of silicon interstitials emitted during thermal oxidation.

引用

页码：242 / 247

页数：6

共 39 条

[31] CRYSTALLOGRAPHIC STUDIES OF SYNTHETIC CORRINOIDS .4. MOLECULAR-STRUCTURE OF A NI(II)OXA-PORPHYRINOID FROM ELECTROCHEMICAL OXIDATION OF A NI(II) SECO-CORRIN
HODGSON, KO
DUNITZ, JD
HELVETICA CHIMICA ACTA, 1976, 59 (05) : 1898 - 1904
[32] Defect chemical studies on oxygen release from the Li-rich cathode material Li1.2Mn0.6Ni0.2O2-δ
Nakamura, Takashi
Gao, Hongze
Ohta, Kento
Kimura, Yuta
Tamenori, Yusuke
Nitta, Kiyofumi
Ina, Toshiaki
Oishi, Masatsugu
Amezawa, Koji
JOURNAL OF MATERIALS CHEMISTRY A, 2019, 7 (09) : 5009 - 5019
[33] Defect-engineered Ni-Fe-LDH with porous flower-like architecture enables boosted advanced oxidation processes: Experimental and theoretical studies
Yang, Zhongzhu
Yang, Kaihua
Zhang, Chang
SEPARATION AND PURIFICATION TECHNOLOGY, 2024, 333
[34] Computational studies on defect chemistry and Li-ion conductivity of spinel-type LiAl5O8 as coating material for Li-metal electrode
Shuntaro Miyakawa
Shogo Matsuda
Naoto Tanibata
Hayami Takeda
Masanobu Nakayama
Takaya Saito
Svetlana Fukuchi
Scientific Reports, 12
[35] Computational studies on defect chemistry and Li-ion conductivity of spinet-type LiAl5O8 as coating material for Li-metal electrode
Miyakawa, Shuntaro
Matsuda, Shogo
Tanibata, Naoto
Takeda, Hayami
Nakayama, Masanobu
Saito, Takaya
Fukuchi, Svetlana
SCIENTIFIC REPORTS, 2022, 12 (01)
[36] UTILIZATION OF ACENAPHTHENE AS CHEMICAL RAW MATERIAL .2. STUDIES ON PROCESS OF ACENAPHTHENOL SYNTHESIS BY ACENAPHTHENE OXIDATION WITH RED LEAD OXIDE IN GLACIAL ACETIC ACID WITH SUBSEQUENT HYDROLYSIS
IWANICKA, T
ORMANIEC, W
PRZEMYSL CHEMICZNY, 1967, 46 (03): : 145 - &
[37] NMR SPECTROSCOPIC, MOLECULAR MECHANICS AND X-RAY CRYSTALLOGRAPHIC STUDIES OF PERFORMIC ACID OXIDATION-PRODUCTS OF 4-METHYLBICYCLO[2.2.1]HEPT-5-EN-2-ONES, 5-METHYLBICYCLO[2.2.1]HEPT-5-EN-2-ONES AND 6-METHYLBICYCLO[2.2.1]HEPT-5-EN-2-ONES .2.
KOLEHMAINEN, E
LAIHIA, K
RISSANEN, K
KORVOLA, J
NIEMI, V
ACTA CHEMICA SCANDINAVICA, 1992, 46 (03): : 290 - 297
[38] X-ray Crystallographic Studies of a Bimetallic cis-Mo(CO)4(PPh2NH2CH2CH2N=CHC6H4-o-O)2Cu Complex, the Starting Material, cis-Mo(CO)4(PPh2Cl)2, and the Reaction Intermediates cis-Mo(CO)4(PPh2NH2CH2CH2NH2)2 and cis-Mo(CO)4(PPh2NH2CH2CH2N=CHC6H4-o-OH)2
Duffey, Christina
Stepleton, Seth
Anderson, Mary Elizabeth
Cox, Daniel
Ready, Marty
Byrd, Houston
Bloomfield, Carrie A.
Freeman, Jason L.
Gray, Gary M.
JOURNAL OF CHEMICAL CRYSTALLOGRAPHY, 2011, 41 (10) : 1560 - 1567
[39] X-ray Crystallographic Studies of a Bimetallic cis-Mo(CO)4(PPh2NH2CH2CH2N=CHC6H4-o-O)2Cu Complex, the Starting Material, cis-Mo(CO)4(PPh2Cl)2, and the Reaction Intermediates cis-Mo(CO)4(PPh2NH2CH2CH2NH2)2 and cis-Mo(CO)4(PPh2NH2CH2CH2N=CHC6H4-o-OH)2
Christina Duffey
Seth Stepleton
Mary Elizabeth Anderson
Daniel Cox
Marty Ready
Houston Byrd
Carrie A. Bloomfield
Jason L. Freeman
Gary M. Gray
Journal of Chemical Crystallography, 2011, 41 : 1560 - 1567

← 1 2 3 4 →