CHEMICAL HYDRODYNAMICS OF GROWTH OF EPITAXIAL SILICON LAYERS

被引：0
|
作者：
PROKOPEV, EP
机构：
来源：
JOURNAL OF APPLIED CHEMISTRY OF THE USSR | 1983年 / 56卷 / 07期
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中图分类号：
O69 [应用化学];
学科分类号：
081704 ;
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页码：1535 / 1536
页数：2
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