MEASURED AND SIMULATED ELECTRON-ENERGY DISTRIBUTION-FUNCTIONS IN A LOW-PRESSURE RADIO-FREQUENCY DISCHARGE IN ARGON

被引：26
|
作者：
TURNER, MM
DOYLE, RA
HOPKINS, MB
机构：
[1] School of Physical Sciences, Dublin City University, Glasnevin
来源：
APPLIED PHYSICS LETTERS | 1993年 / 62卷 / 25期
关键词：
D O I：
10.1063/1.109088
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
We report a combined experimental and computational study of a low-pressure radio frequency discharge in argon. We have determined the electron energy distribution function experimentally using a Langmuir probe system and by simulation using the particle in cell method. A close comparison of these data shows good agreement over pressures from 20 to 200 mTorr. This pressure range encompasses the putative transition from a stochastic to an ohmic electron heating mode [V. A. Godyak and R. B. Piejak, Phys. Rev. Lett. 65, 996 (1990)]. The simulation does show such a transition, and we agree with earlier estimates of the transition pressure.
引用
收藏
页码：3247 / 3249
页数：3
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