SOME PROPERTIES OF ALUMINUM-NITRIDE POWDER PREPARED BY METAL-ORGANIC CHEMICAL-VAPOR-DEPOSITION

被引：10

作者：

KUBO, K ^{[1
]}

ITATANI, K ^{[1
]}

HOWELL, FS ^{[1
]}

KISHIOKA, A ^{[1
]}

KINOSHITA, M ^{[1
]}

机构：

[1] SOPHIA UNIV, FAC SCI & ENGN, DEPT CHEM, CHIYODA KU, TOKYO 102, JAPAN

来源：

JOURNAL OF THE EUROPEAN CERAMIC SOCIETY | 1995年 / 15卷 / 07期

关键词：

D O I：

10.1016/0955-2219(95)00039-W

中图分类号：

TQ174 [陶瓷工业]; TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

Ultrafine aluminium-nitride (AlN) powders with primary particle sizes of 10-20 nm were prepared by a metal-organic chemical vapour deposition (MOCVD): trimethylaluminium (Al(CH3)(3)), triethylaluminium (Al(C2H5)(3)) and triisobutylaluminium (Al(i-C4H9)(3))-vapours were reacted with ammonia (NH3) at 1050 degrees C. the sintered compacts with relative densities of similar to 95% could be fabricated by firing these compressed powders at temperatures as low as 1600 degrees C. The relative densities of the Al(CH3)(3)-derived and Al(C2H5)(3)-derived compacts fired at 1800 degrees C for 10 h attained similar to 98%. the oxygen contents of these compacts were 1.8 and 4.7%, respectively.

引用

页码：661 / 666

页数：6

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