SEMICONDUCTOR APPLICATIONS OF FOCUSED ION-BEAM MICROMACHINING

被引：0
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作者：
SHAVER, DC
WARD, BW
机构：
来源：
SOLID STATE TECHNOLOGY | 1985年 / 28卷 / 12期
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中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
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页码：73 / 78
页数：6
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