MATERIALS CHARACTERIZATION USING SECONDARY ION MASS-SPECTROMETRY (SIMS)

被引：0

作者：

KATZ, W ^{[1
]}

SMITH, GA ^{[1
]}

机构：

[1] GE,CORP RES & DEV,SCHENECTADY,NY 12301

来源：

SCANNING ELECTRON MICROSCOPY | 1984年

关键词：

D O I：

暂无

中图分类号：

TH742 [显微镜];

学科分类号：

摘要：

引用

页码：1557 / 1566

页数：10

共 50 条

[1] MATERIALS CHARACTERIZATION USING SECONDARY ION MASS SPECTROMETRY (SIMS).
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[J]. Scanning Electron Microscopy, 1984, (pt 4) : 1557 - 1566
[2] CHARACTERIZATION OF POLYMERS USING STATIC SECONDARY ION MASS-SPECTROMETRY (SIMS)
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[J]. ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY, 1988, 196 : 154 - PMSE
[3] SECONDARY ION MASS-SPECTROMETRY (SIMS)
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[J]. JOURNAL OF ELECTRON MICROSCOPY, 1975, 24 (01): : 57 - 58
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[7] APPLICATIONS OF SECONDARY ION MASS-SPECTROMETRY (SIMS) FOR THE ANALYSIS OF ELECTRONIC MATERIALS
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[8] SURFACE ANALYSIS OF INSULATING MATERIALS BY SECONDARY ION MASS-SPECTROMETRY (SIMS)
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[J]. VACUUM, 1989, 39 (11-12) : 1077 - 1087
[10] Process and materials characterization using low energy secondary ion mass spectrometry (SIMS)
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