DISLOCATION REDUCTION IN GAAS WAFERS

被引：0
|
作者：
MOONEY, JB
RIGGS, ML
SHER, A
GIBBONS, JF
机构：
来源：
SEMI-INSULATING III-V MATERIALS, MALMO 1988 | 1988年
关键词：
D O I：
暂无
中图分类号：
O64 [物理化学（理论化学）、化学物理学];
学科分类号：
070304 ; 081704 ;
摘要：
引用
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页码：61 / 64
页数：4
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