SPUTTER DEPOSITION OF DIELECTRIC FILMS USING A MAGNETIC-FIELD FOR PROTECTION FROM HIGH-ENERGY ELECTRONS

被引：2
|
作者：
KHAN, MN
机构：
[1] Dowty Electronics Ltd, Controls Div,, London, Engl, Dowty Electronics Ltd, Controls Div, London, Engl
来源：
THIN SOLID FILMS | 1985年 / 124卷 / 01期
关键词：
D O I：
10.1016/0040-6090(85)90028-8
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
10
引用
收藏
页码：55 / 58
页数：4
相关论文
共 50 条
  • [41] HIGH-ENERGY TAILS IN THE TOTAL ENERGY-DISTRIBUTION OF FIELD EMITTED ELECTRONS FROM TUNGSTEN
    BAKHTIZIN, RZ
    YUMAGUZIN, YM
    PHYSICA STATUS SOLIDI B-BASIC RESEARCH, 1988, 150 (01): : 103 - 108
  • [42] REGISTRATION OF ELECTRONS OF ENERGY - 100 MEV TRAPPED BY EARTHS MAGNETIC-FIELD
    BASILOVA, RN
    GRIGOROV, NL
    KOGANLASKINA, EI
    PUGACHEVA, GI
    JETP LETTERS, 1978, 27 (05) : 260 - 264
  • [43] PREPARATION AND PROPERTIES OF A-SI FILMS DEPOSITED AT A HIGH DEPOSITION RATE UNDER A MAGNETIC-FIELD
    OHNISHI, M
    NISHIWAKI, H
    UCHIHASHI, K
    YOSHIDA, K
    TANAKA, M
    NINOMIYA, K
    NISHIKUNI, M
    NAKAMURA, N
    TSUDA, S
    NAKANO, S
    YAZAKI, T
    KUWANO, Y
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1988, 27 (01): : 40 - 46
  • [44] ON THE MECHANISM OF THE EMISSION OF HIGH-ENERGY ELECTRONS FROM THE SURFACES OF FRESHLY PEELED FILMS - POLYTETRAFLUOROETHYLENE
    DERJAGUIN, BV
    KLUEV, VA
    ANISIMOVA, VI
    TOPOROV, YP
    KROTOVA, NA
    JOURNAL OF COLLOID AND INTERFACE SCIENCE, 1980, 77 (02) : 472 - 478
  • [45] ON THE MECHANISM OF THE EMISSION OF HIGH-ENERGY ELECTRONS FROM THE SURFACES OF FRESHLY PEELED FILMS - POLYTETRAFLUOROETHYLENE
    DERJAGUIN, BV
    KLUEV, VA
    ANISIMOVA, VI
    TOPOROV, YP
    KROTOVA, NA
    PROGRESS IN SURFACE SCIENCE, 1994, 45 (1-4) : 168 - 174
  • [46] Preparation of Vanadium Dioxide Films for Protection from High-energy Laser Hits
    LI Xiong wei 1
    2. State Key Lab of Laser Technol.
    3. State Key Lab for Patt.Recogn.& Intel.Control
    Huazhong University of Sci.& Technol.
    SemiconductorPhotonicsandTechnology, 2003, (01) : 46 - 49
  • [47] IBEX MAGNETIC-FIELD EXTRACTION AND PROPAGATION EXPERIMENTS OF INTENSE HIGH-ENERGY ELECTRON-BEAMS
    MAZARAKIS, MG
    MILLER, RB
    POUKEY, JW
    ADLER, RJ
    JOURNAL OF APPLIED PHYSICS, 1987, 62 (10) : 4024 - 4035
  • [48] ON THE FEASIBILITY OF PASSIVE TUNING OF THE MAGNETIC-FIELD IN HIGH-ENERGY FIXED-FREQUENCY SUPERCONDUCTING CYCLOTRONS
    OSTOJIC, R
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT, 1991, 309 (1-2): : 17 - 20
  • [49] THE STUDY OF HIGH-ENERGY ELECTRONS USING TRANSITION RADIATION
    MARIN, AA
    HASEGAN, D
    BLAJ, C
    DORCIOMAN, D
    DRAGHICESCU, M
    TUTOS, I
    GRIGOROV, NL
    GUSEV, AA
    PUGACHEVA, GI
    TITENKOV, AF
    ZATZEPIN, VI
    REVUE ROUMAINE DE PHYSIQUE, 1981, 26 (06): : 545 - 551
  • [50] CONTROLLING THE ENERGY-DISTRIBUTION OF THE BEAM AT THE PLATEAU OF THE MAGNETIC-FIELD OF THE INSTITUTE OF HIGH-ENERGY PHYSICS PHOTON SYNCHROTRON
    GUROV, GG
    SOVIET ATOMIC ENERGY, 1978, 45 (02): : 804 - 807
12345