SPUTTER DEPOSITION OF DIELECTRIC FILMS USING A MAGNETIC-FIELD FOR PROTECTION FROM HIGH-ENERGY ELECTRONS

被引：2
|
作者：
KHAN, MN
机构：
[1] Dowty Electronics Ltd, Controls Div,, London, Engl, Dowty Electronics Ltd, Controls Div, London, Engl
来源：
THIN SOLID FILMS | 1985年 / 124卷 / 01期
关键词：
D O I：
10.1016/0040-6090(85)90028-8
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
10
引用
收藏
页码：55 / 58
页数：4
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