ION-BEAM-ASSISTED DEPOSITION OF THIN-FILMS

被引：235
|
作者：
MARTIN, PJ
MACLEOD, HA
NETTERFIELD, RP
PACEY, CG
SAINTY, WG
机构：
来源：
APPLIED OPTICS | 1983年 / 22卷 / 01期
关键词：
D O I：
10.1364/AO.22.000178
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
引用
收藏
页码：178 / 184
页数：7
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