ION-BEAM-ASSISTED DEPOSITION OF THIN-FILMS

被引：235
|
作者：
MARTIN, PJ
MACLEOD, HA
NETTERFIELD, RP
PACEY, CG
SAINTY, WG
机构：
来源：
APPLIED OPTICS | 1983年 / 22卷 / 01期
关键词：
D O I：
10.1364/AO.22.000178
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
引用
收藏
页码：178 / 184
页数：7
相关论文
共 50 条
  • [31] EFFECT OF DEPOSITION PARAMETERS ON THE MICROSTRUCTURE OF ION-BEAM-ASSISTED DEPOSITION TIN FILMS
    KHEYRANDISH, H
    COLLIGON, JS
    KIM, JK
    [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1994, 12 (05): : 2723 - 2727
  • [32] Influence of ion current on the growth of carbon films by ion-beam-assisted deposition
    Gago, R
    Böhme, O
    Albella, JM
    Román, E
    [J]. DIAMOND AND RELATED MATERIALS, 1999, 8 (10) : 1944 - 1950
  • [33] ION-BEAM ASSISTED DEPOSITION OF OPTICAL THIN-FILMS - RECENT RESULTS
    MCNALLY, JJ
    ALJUMAILY, GA
    WILSON, SR
    MCNEIL, JR
    [J]. PROCEEDINGS OF THE SOCIETY OF PHOTO-OPTICAL INSTRUMENTATION ENGINEERS, 1985, 540 : 479 - 485
  • [34] ION-BEAM-ASSISTED DEPOSITION OF AL FILMS WITH STRONG PREFERENTIAL ORIENTATION
    MASAKI, S
    KOBAYASHI, H
    MORISAKI, H
    [J]. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1991, 59 : 292 - 296
  • [35] Ion-beam-assisted deposition of magnesium oxide films for coated conductors
    Weber, TP
    Ma, B
    Balachandran, U
    McNallan, M
    [J]. PROCESSING OF HIGH-TEMPERATURE SUPERCONDUCTORS, 2003, 140 : 45 - 52
  • [36] ION-BEAM-ASSISTED DEPOSITION OF FERROELECTRIC PBTIO3 FILMS
    QU, BD
    ZHONG, WL
    WANG, KM
    ZHANG, PL
    WANG, ZL
    LI, WZ
    [J]. JOURNAL OF APPLIED PHYSICS, 1993, 74 (04) : 2896 - 2899
  • [37] BORON-NITRIDE FILMS SYNTHESIZED BY ION-BEAM-ASSISTED DEPOSITION
    BOUCHIER, D
    MOLLER, W
    [J]. SURFACE & COATINGS TECHNOLOGY, 1992, 51 (1-3): : 190 - 196
  • [38] Characterisation of chromium nitride films prepared by ion-beam-assisted deposition
    Engel, P
    Schwarz, G
    Wolf, GK
    [J]. SURFACE & COATINGS TECHNOLOGY, 1999, 112 (1-3): : 286 - 290
  • [39] A NEW AND SIMPLE ION-SOURCE FOR ION-BEAM ASSISTED DEPOSITION OF THIN-FILMS
    HUBLER, R
    SCHREINER, WH
    BAUMVOL, IJR
    [J]. PHYSICA STATUS SOLIDI A-APPLIED RESEARCH, 1991, 127 (01): : K19 - K23
  • [40] High-rate deposition of cBN films by ion-beam-assisted vapor deposition
    Sueda, M
    Kobayashi, T
    Rokkaku, T
    Ogawa, M
    Watanabe, T
    Morimoto, S
    [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 1998, 16 (06): : 3287 - 3294
12345