PLASMA PARAMETERS OF A RADIO-FREQUENCY DISCHARGE

被引：9
|
作者：
ANDERSON, CA
HOPKINS, MB
GRAHAM, WG
机构：
[1] DUBLIN CITY UNIV,DEPT PHYS,DUBLIN,IRELAND
[2] QUEENS UNIV BELFAST,DEPT PHYS,BELFAST BT7 1NN,ANTRIM,NORTH IRELAND
来源：
REVIEW OF SCIENTIFIC INSTRUMENTS | 1990年 / 61卷 / 01期
关键词：
D O I：
10.1063/1.1141269
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
A low-frequency (100 kHz) radio frequency discharge has been characterized by making time-resolved measurements of the basic plasma parameters, including the electron energy-distribution function. Measurements obtained when operating with H2, D2, and Ar are compared. Surprisingly low electron temperatures (∼0.2 eV) have been found in H2 and D 2 discharges.
引用
收藏
页码：448 / 450
页数：3
相关论文
共 50 条
  • [31] Characterization of a radio-frequency discharge used for downstream plasma oxidation of Si
    Cook, J.G.
    LeBrun, L.
    Zhongming, Li
    Ogryzlo, E.A.
    Journal of Applied Physics, 1995, 77 (04):
  • [32] Instability and melting of a crystal of microscopic particles in a radio-frequency discharge plasma
    Schweigert, IV
    Schweigert, VA
    Bedanov, VM
    JOURNAL OF EXPERIMENTAL AND THEORETICAL PHYSICS, 1998, 87 (05) : 905 - 915
  • [33] Neutral Ingestion Effects on Plume Properties of a Radio-Frequency Plasma Discharge
    Caruso, Natalie R. S.
    Walker, Mitchell L. R.
    JOURNAL OF PROPULSION AND POWER, 2018, 34 (01) : 58 - 65
  • [34] PLASMA POLYMERIZATION OF TETRAFLUOROETHYLENE .2. CAPACITIVE RADIO-FREQUENCY DISCHARGE
    MOROSOFF, N
    YASUDA, H
    BRANDT, ES
    REILLEY, CN
    JOURNAL OF APPLIED POLYMER SCIENCE, 1979, 23 (12) : 3449 - 3470
  • [35] Discharge phenomena of an atmospheric pressure radio-frequency capacitive plasma source
    Park, J
    Henins, I
    Herrmann, HW
    Selwyn, GS
    Hicks, RF
    JOURNAL OF APPLIED PHYSICS, 2001, 89 (01) : 20 - 28
  • [36] The radio-frequency discharge in a metal chamber
    Shishkin, AG
    Shishkin, GG
    JOURNAL OF COMMUNICATIONS TECHNOLOGY AND ELECTRONICS, 2002, 47 (03) : 324 - 329
  • [37] INVESTIGATION OF A RESONANT RADIO-FREQUENCY DISCHARGE
    GLAZOV, AA
    NOVIKOV, DL
    SOVIET PHYSICS-TECHNICAL PHYSICS, 1958, 3 (10): : 2106 - 2111
  • [38] NITRIDING OF ZIRCONIUM IN A RADIO-FREQUENCY DISCHARGE
    KONUMA, M
    MATSUMOTO, O
    JOURNAL OF THE LESS-COMMON METALS, 1977, 55 (01): : 97 - 102
  • [39] NITRIDING OF TITANIUM IN A RADIO-FREQUENCY DISCHARGE
    KONUMA, M
    MATSUMOTO, O
    JOURNAL OF THE LESS-COMMON METALS, 1977, 52 (01): : 145 - 152
  • [40] HELIUM RECOMBINATION IN A RADIO-FREQUENCY DISCHARGE
    STAFFORD, B
    DURHAM, J
    SCHLUTER, H
    JOURNAL OF CHEMICAL PHYSICS, 1966, 45 (02): : 670 - +
12345