PLASMA PARAMETERS OF A RADIO-FREQUENCY DISCHARGE

被引：9
|
作者：
ANDERSON, CA
HOPKINS, MB
GRAHAM, WG
机构：
[1] DUBLIN CITY UNIV,DEPT PHYS,DUBLIN,IRELAND
[2] QUEENS UNIV BELFAST,DEPT PHYS,BELFAST BT7 1NN,ANTRIM,NORTH IRELAND
来源：
REVIEW OF SCIENTIFIC INSTRUMENTS | 1990年 / 61卷 / 01期
关键词：
D O I：
10.1063/1.1141269
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
A low-frequency (100 kHz) radio frequency discharge has been characterized by making time-resolved measurements of the basic plasma parameters, including the electron energy-distribution function. Measurements obtained when operating with H2, D2, and Ar are compared. Surprisingly low electron temperatures (∼0.2 eV) have been found in H2 and D 2 discharges.
引用
收藏
页码：448 / 450
页数：3
相关论文
共 50 条
  • [21] Application of modulation techniques to atomic emission spectrometry with inductively-coupled radio-frequency plasma and radio-frequency glow discharge plasma
    Wagatsuma, K
    APPLIED SPECTROSCOPY REVIEWS, 2002, 37 (02) : 223 - 245
  • [22] Influence of Discharge Parameters on Tuned Substrate Self-Bias in an Radio-Frequency Inductively Coupled Plasma
    丁振峰
    孙景超
    王友年
    Plasma Science & Technology, 2005, (06) : 3117 - 3121
  • [23] Influence of discharge parameters on tuned substrate self-bias in an radio-frequency inductively coupled plasma
    Ding, ZF
    Sun, JC
    Wang, YN
    PLASMA SCIENCE & TECHNOLOGY, 2005, 7 (06) : 3117 - 3121
  • [24] Plasma local parameters measuring in the low power radio-frequency ion thruster's discharge chamber
    Kozhevnikov, Vladimir
    Khartov, Sergey
    Suvorov, Maxim
    Cherniy, Ivan
    ELECTRIC PROPULSIONS AND THEIR APPLICATION, 2017, 185 : 432 - 437
  • [25] Estimation of plasma parameters using radio-frequency resonance technique
    Mishra, A
    Patnaik, CUS
    Misra, P
    JOURNAL OF THE PHYSICAL SOCIETY OF JAPAN, 2001, 70 (07) : 1966 - 1970
  • [26] Complex Plasma Structure Observed in the Inlet of an Argon Radio-Frequency Discharge
    Lemmer, Kristina M.
    Kirtley, David E.
    IEEE TRANSACTIONS ON PLASMA SCIENCE, 2014, 42 (12) : 4038 - 4039
  • [27] Dust Particle Density and Charges in Radio-Frequency Mixture Discharge Plasma
    Wu Jing
    Zhang Peng-Yun
    Sun Ji-Zhong
    Yao Lie-Ming
    Duan Xu-Ru
    CHINESE PHYSICS LETTERS, 2011, 28 (09)
  • [28] PLASMA POLYMERIZATION OF TETRAFLUOROETHYLENE .1. INDUCTIVE RADIO-FREQUENCY DISCHARGE
    YASUDA, H
    MOROSOFF, N
    BRANDT, ES
    REILLEY, CN
    JOURNAL OF APPLIED POLYMER SCIENCE, 1979, 23 (04) : 1003 - 1011
  • [29] CHARACTERIZATION OF HYDROPHOBICITY GRADIENTS PREPARED BY MEANS OF RADIO-FREQUENCY PLASMA DISCHARGE
    GOLANDER, CG
    PITT, WG
    BIOMATERIALS, 1990, 11 (01) : 32 - 35
  • [30] Instability and melting of a crystal of microscopic particles in a radio-frequency discharge plasma
    I. V. Schweigert
    V. A. Schweigert
    V. M. Bedanov
    A. Melzer
    A. Homann
    A. Piel
    Journal of Experimental and Theoretical Physics, 1998, 87 : 905 - 915
12345