ADSORPTION AND REACTION OF OXYGEN ON SI(100) - A MODULATED MOLECULAR-BEAM AND TIME-RESOLVED X-RAY PHOTOELECTRON-SPECTROSCOPY STUDY

被引：1
|
作者：
DEVELYN, MP [1 ]
NELSON, MM [1 ]
ENGEL, T [1 ]
机构：
[1] UNIV WASHINGTON,DEPT CHEM,SEATTLE,WA 98195
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1987年 / 5卷 / 04期
关键词：
D O I：
10.1116/1.574656
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
引用
收藏
页码：642 / 644
页数：3
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