ADSORPTION AND REACTION OF OXYGEN ON SI(100) - A MODULATED MOLECULAR-BEAM AND TIME-RESOLVED X-RAY PHOTOELECTRON-SPECTROSCOPY STUDY

被引：1

作者：

DEVELYN, MP ^{[1
]}

NELSON, MM ^{[1
]}

ENGEL, T ^{[1
]}

机构：

[1] UNIV WASHINGTON,DEPT CHEM,SEATTLE,WA 98195

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1987年 / 5卷 / 04期

关键词：

D O I：

10.1116/1.574656

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：642 / 644

页数：3

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